LABORATORIO DE RECUBRIMIENTOS DUROS Y APLICACIONES INDUSTRIALES - RDAI

Sample Stage Diameter

200mm

Sample Thickness

300mm maximun

Scan Length Range

50mm maximum

X-Y Stage Translation

150mm X 178mm

Stage Positioning

Motorized and programmable

Vertical Range

400 µ m maximum

Vertical Resolution

1Å at 10 µ m, 15Å at 100 µ m, 62Å at 400 µ m

Max. Data Points per Scan

60,000

Sample Viewing

Color Camera

Magnification

40-160X motorized zoom

Field of View

1-4mm

Stylus Tip Radius

2.0 microns

Stylus Force Range

.05-10mg (programmable)

Computer System

Intel microprocessor with Windows XP

Scan Filtering

Low-pass, high-pass, band-pass, and adjustable filter

Stress Software

Standard

Vacuum Chuck

Standard

Step Height Repeatability

10Å, or 0.1% of nominal step; whichever is greater

Standard Analytical Software

Roughness Parameters

Ra, Rq, Rp, Rv, Rt, Rz

Waviness Parameters

Wa, Wq, Wp, Wv, Wt, Wz

Step Height Parameters

Avg. Step Ht., Avg. Ht., Max. Peak, Max. Valley, Peak to Valley

Geometry Parameters

Area, Slope Radius, Perimeter

Other Parameters

Stress analysis, height histogram, skewness, profile subtraction

Automation

Scan stitching, step detection, auto level, auto measure

Scan Filtering

Low-pass, high-pass, band-pass, and adjustable filter

Ambios Technology Reference Standard

1 micron nominal step height